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 CK型超高真空金属油扩散泵 |
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特点[Features]
| 1、结构紧凑 |
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Compact Structure |
| 2、装有挡板. |
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Equipped with Baffles |
| 3、可获得超高真空 |
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Producing Ultra-Hing Vacuum |
| 4、返油率低 |
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Low Oil Backstreaming |
| 5、工作可靠 |
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Reliable Operation |
| 6、使用寿命长 |
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Long Service Life |
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用途[APPLICATIONS]
| 用于超高真空镀膜设备 |
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In other ultra-high vacuum coatere |
| 2、其他超高真空系统 |
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In other ultra-high vacuum systems |
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技术参数[Specifications] |
| 型号Model |
CK-150 |
CK-200 |
CK-300 |
| 极限压力Ultimate
pressure
(Pa) |
7×10-8 |
7×10-8 |
7×10-8 |
| 抽气速率Pumping
speed
(L/s) |
800 |
1500 |
2500 |
| 最大排气压力Max.
pumping pressure (Pa) |
40 |
40 |
40 |
| 加热功率Heating
power
(KW) |
1-1.2 |
1.2-1.5 |
2.2-2.3 |
| 注入油量Oil
filling
(L) |
0.26 |
0.5 |
1.2-1.3 |
| 重量Weight
(L/min) |
20 |
25 |
35 |
外形及连接尺寸[Overall
& Connection Dimensions]
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| 型号Model |
CK-150 |
CK-200 |
CK-300 |
| A |
180 |
240 |
330 |
| L |
165 |
200 |
280 |
| D |
202 |
253 |
365 |
| D1 |
181 |
231.8 |
338 |
| d |
110 |
130 |
145 |
| d1 |
90 |
110 |
125 |
| H |
500 |
550 |
680 |
| B |
230 |
265 |
400 |
| C |
375 |
435 |
590 |
| n-MS |
20-M8 |
24-M8 |
32-M10 |
| n1-MS1 |
4-M8 |
4-M8 |
4-M8 |
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